Welcome to the NEMS Lab in the Department of Electrical and Computer Engineering at the University of Denver.  At the DU NEMS Lab, we are focused on design, fabrication, integration and packaging of Micro and Nano-Electro-Mechanical Systems.  Specific areas of interest include Silicon Resonant Nanobalances for Molecular-Level Mass Sensing, Nano-Robotics and Nano-Mechatronics for Cellular and Molecular Biology, and Processes for Batch Nanofabrication, and Low Cost Silicon Solar Technologies.

The NEMS Lab is a unit member of the Center for Nanoscale Science and Engineering at the University of Denver.
 

• September 2008: A small size state of the art Reactive Ion Etching System was purchased from Trion Technology, Inc. for the Nanofabrication Lab and is on its way to be installed in the NEMSLab cleanroom.

• September 2008: Mr. Arash Hajjam joins the lab as the second full-time research assistant and PhD candidate.

• August 2008: The NEMS Lab receives a $51,782 grant from the National Science Foundation for Design and Optimization of High Frequency Silicon Capacitive Resonators for High-Q Operation in Liquid Media.
   

• August 2008: The NEMS Lab receives a $240,302 grant from the National Science Foundation for Development of a Hybrid Nano-Electro-Mechanical Sensor Technology for Nanoscale Aerosol Mass and Momentum probing. This 3-year project will be performed in collaboration with Professor James C. Wilson and the DU Aerosol Group.

• July 2008: The first measurement results were successfully obtained from resonant silicon capacitive resonators fabricated at the NEMS Lab as heavy metal ion detectors in water.
   

• July 2008: Under the NSF Nanotechnology Educational Grant a hands-on Nanotechnology introductory session was added to the Extreme Sports Summer Camp Outreach Program for participating high school students.  Thanks to Professor Lengsfeld for organization of the program.

• June 2008: The NEMS Lab receives a $15,000 PROF grant from the University of Denver for Design and Fabrication of a Micro-Scale Silicon-Based Batch Nanolithography System.
   

• June 2008: The first resonance peaks were successfully measured from out-of-plane silicon beam resonators fabricated in the NEMS Lab.  Frequencies 1-10MHz and Quality factors up to 400 were measured in air.

• December 2007: The NEMS Lab starts fabrication of its first devices. The first micro/nanoscale electromechanical devices ever fabricated on DU campus!

• November 2007: The fully automated Thermco MiniBrute Oxidation, Doping and Anneal furnace was delivered and installed in the Nanofabrication lab.

• October 2007: The new 200 square-foot softwall class-100 cleanroom area was installed in the Nanofabrication laboratory.

• September 2007: Mr. Amir Rahafrooz joins the lab as the first full-time research assistant and PhD candidate.

• August 2007: The NEMS Lab receives $198,657 of NSF funding to develop a Nanotechnology curriculum at the University of Denver college of Engineering and Computer Science in collaboration with Professors: Kumosa, Matin, Lengsfeld, and Yi.