DU Integrated Nano-Systems Group



The NEMS Lab has total area of 1200 square foot that includes a 200 square foot class 100 softwall cleanroom/yellow-room. Thermal processing, metal deposition, metrology and inspection, wet etching as well as electrical measurement and characterization tools are available in the lab for both research and educational activities.
Equipment Available in the Nanofabrication and Measurement Laboratory: (1) Cobilt CA-800 Mask Aligner (2) Laurell Spin Coater (3) Automated Thermco MB-71, oxidation/doping/annealing furnace (4) Lindberg high temperature oven (5) Denton Vacuum DV501 Evaporator (6) Veeco VE401 Evaporator (7) MARPET MEI1204W Wire Wedge Bonder (8) HP-8753D Network Analyzer (9) KarlSuss PM-8 Probe Station (10) Jandel 4-Point Probe Resistivity Measurement System (11) Plasmos SD2000 Ellipsometer (12) Gartener Scientific Model L115A Ellipsometer (13) Optical Spectrum Analyzer (14) Laser Driver (15) Other basic micro/nano-fabrication equipment and accessories such as optical microscopes, hot-plates, ovens, fume hoods, DI water generator, etc.
Other Major Equipment on DU Campus Available to the Group: SEM: The School of Engineering and Computer Science has a JEOL 5800LV scanning electron microscope (SEM) equipped with secondary and backscatter electron detectors, and an X-ray detector for energy dispersive spectroscopy (EDS). The instrument can operate at low vacuum (<2 torr) for analysis of uncoated and biological samples.
AFM: School of Engineering and Computer Science shares an MFP-3D Atomic Force Microscope with bio-sample capability with the school of Natural Sciences and Mathematics. E-beam Lithography: Jeol JSM-IC848a scanning electron microscope, with the NPGS nanolithography system is available on-campus through the physics department at a minor cost.