Issued Patents

1. F. Ayazi, S. Pourkamali and G. K. Ho, “Capacitive Vertical Silicon Bulk Acoustic Resonator (SiBAR),” US patent No. 7,176,770, February 2007.

2. F. Ayazi, and S. Pourkamali, “Electrically-coupled micro-electro-mechanical filter systems and methods,” US patent No.7,098,757, August 2006.

3. F. Ayazi, R. Abdolvand and S. Pourkamali, “Methods of forming oxide masks with submicron openings therein and microstructures formed thereby,” US patent No. 7,056,757, June 2006.

4. F. Ayazi, and S. Pourkamali, “Capacitive resonators and methods of fabrication,” US patent No. 7,023,065, April 2006.

Standing Patent Applications

1. F. Ayazi, R. Abdolvand and S. Pourkamali, “Methods of forming oxide masks with submicron openings and microstructures formed thereby,” US patent application No. 20070001267, January 2007.

2. F. Ayazi, S. Pourkamali and G. K. Ho, “Capacitive Resonators,” US patent application No. 20060273416, December 2006.

3. F. Ayazi, G. K. Ho, and S. Pourkamali, “Highly tunable low-impedance capacitive micromechanical resonators, oscillators, and processes relating thereto,” US patent application No. 20060125576, June 2006.

4. F. Ayazi, and S. Pourkamali, “CMOS compatible wafer level vacuum packaging,” Invention disclosure filed at Georgia Tech. Office of Technology Licensing, GTRC ID No. 3802, March 2006.