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Journal
Publications
1. S. Pourkamali, G. K. Ho
and F. Ayazi, “Low-impedance VHF and UHF capacitive silicon
bulk acoustic wave resonators, Part I: concept and
fabrication,” IEEE Transactions on Electron
Devices, Vol. 54, No. 8, August 2007,
pp.2017-2023.
2. S. Pourkamali, G. K. Ho
and F. Ayazi, “Low-impedance VHF and UHF capacitive silicon
bulk acoustic wave resonators, Part II: measurement and
characterization,” IEEE Transactions on Electron
Devices, Vol. 54, No. 8, August 2007,
pp.2024-2030.
3. K. Sundaresan, G.K. Ho, S. Pourkamali, and F. Ayazi, “Electronically temperature compenstated silicon bulk acoustic resonator reference oscillator,” IEEE Journal of Solid State Circuits, Vol. 42, No. 6, June 2007, pp. 1425-1434.
4. K. Sundaresan, G.K. Ho,
S. Pourkamali, and F. Ayazi, “Electronically temperature
compenstated silicon bulk acoustic resonator reference
oscillator,” In press, IEEE Journal of Solid State Circuits.
5. S. Pourkamali and F.
Ayazi, “Electrically coupled MEMS bandpass filters-Part I:
with coupling element,” Journal of Sensors and Actuators A
122, 2005, pp.307-316.
6. S. Pourkamali and F.
Ayazi, “Electrically coupled MEMS bandpass filters-Part II:
without coupling element,” Journal of Sensors and Actuators
A 122, 2005, pp.317-325.
7. S. Pourkamali, Z. Hao
and F. Ayazi, “VHF single crystal silicon side supported
disk resonators-Part II: implementation and
characterization,” Journal of Micro Electro Mechanical
Systems, Vol. 13, Issue 6, December 2004, pp. 1054-1062.
8. Z. Hao, S. Pourkamali
and F. Ayazi, “VHF single crystal silicon side supported
disk resonators-Part I: Design and Modeling,” Journal of
Micro Electro Mechanical Systems, Vol. 13, Issue 6, December
2004, pp. 1043-1053.
9. S. Pourkamali, et al,
“High-Q single crystal silicon HARPSS capacitive beam
resonators with self-aligned sub-100nm transduction gaps,”
Journal of Micro Electro Mechanical Systems, Vol. 12, Issue
4, August 2003, pp. 487-496.
Referred Conference
Publications
1. S. Pourkamali, and F. Ayazi, “Wafer-Level Encapsulation and Sealing of Electrostatic HARPSS Transducers,” proceedings, 2007 IEEE Sensors Conference,
pp. 49-52.
2.
Qishu Qin, Siavash Pourkamali, and Farrokh Ayazi, “Capacitively Coupled VHF Silicon Bulk Acoustic Wave Filters,” proceedings, 2007 International Ultrasonics Symposium,
pp1649-1652.
3.
F. Ayazi, S. Pourkamali,
G. K. Ho and R. Abdolvand, “High-aspect-ratio SOI vibrating
micromechanical resonators and filters,” invited paper,
proceedings, International Microwave Symposium, 2006
(IMS’06), pp. 676-679.
4. K. Sundaresan, G. K. Ho,
S. Pourkamali and F. Ayazi, “A low phase noise 100MHz
silicon BAW reference oscillator,” proceedings, Custom
Integrated Circuit Conference, 2006 (CICC’06).
5. S. Pourkamali and F.
Ayazi, “High frequency low impedance silicon BAR
structures,” Proceedings, Hilton Head 2006, solid-state
sensor, actuator and Microsystems workshop, pp. 284-287.
6. G.K. Ho, K. Sundaresan,
S. Pourkamali and F. Ayazi, “Temperature compensated IBAR
reference oscillators,” proceeding, MEMS’06, pp. 910-913.
7. S. Pourkamali, G. K. Ho
and F. Ayazi, “Vertical Capacitive SiBARs,” proceedings,
MEMS’05, pp. 211-214.
8. G.K. Ho, K. Sundaresan,
S. Pourkamali and F. Ayazi, "Low impedance, highly tunable,
I2-resonators for temperature compensated reference
oscillators,” proceedings, MEMS’05, pp. 116-120.
9. K. Sundaresan, G.K. Ho,
S. Pourkamali and F. Ayazi, "A 2-chip
micro-electro-mechanical reference oscillator," proceedings,
ISCAS‘05, pp.5461-5464.
10. Z. Hao, S. Pourkamali
and F. Ayazi, “Longitudinal block resonators for detecting
mass variation at single molecule sensitivity,” the 5th
Georgia Tech Conf. on Nanoscience and Nanotech., Nov. 2004.
11. S. Pourkamali and F.
Ayazi, “High frequency capacitive micromechanical resonators
with reduced motional resistance using the HARPSS
technology,” 5th Silicon RF topical meeting 2004, pp.
147-150.
12. S. Pourkamali and F.
Ayazi, “18m thick high frequency capacitive HARPSS
resonators with reduced motional resistance,” proceedings,
Hilton Head 2004, solid-state sensor, actuator and
Microsystems workshop, pp. 392-393.
13. B. Vakili, S.
Pourkamali and F. Ayazi, “A new input switching scheme for a
capacitive micro-g accelerometer,” proceedings, Symposium on
VLSI Circuits, 2004, pp. 310
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14. B. Vakili, S. Pourkamali, and F. Ayazi,
“A 2.5V 14-bit sigma-delta CMOS_SOI capacitive
accelerometer,” Digest of technical papers, ISSCC’04, pp.
314-315.
15. S. Pourkamali, and F. Ayazi, “Fully
single crystal silicon resonators with deep-submicron
dry-etched transducer gaps,” proceedings, MEMS’04, pp.
813-816.
16. S. Pourkamali, R. Abdolvand, G. K. Ho,
and F. Ayazi, “Electrostatically coupled micromechanical
beam filters,” proceedings, MEMS’04, pp. 584-587.
17. B. Vakili, S. Pourkamali, and F. Ayazi,
“A high resolution, stictionless, CMOS compatible SOI
accelerometer with a low noise, low power, 0.25m
CMOS interface,” proceedings, MEMS’04, pp.572-575.
18. S. Pourkamali, and F. Ayazi,
“SOI-based HF and VHF single-crystal silicon resonators with
sub-100nm vertical capacitive gaps,” proceedings,
Transducers ’03, 2003, pp.837-840.
19. S. Pourkamali, R. Abdolvand, and F.
Ayazi, “A 600kHz electrically coupled MEMS bandpass filter,”
proceedings, MEMS‘03, 2003, pp. 702-705.
20. S. Y. No, A. Hashimura, S. Pourkamali,
F. Ayazi, “Single crystal silicon HARPSS capacitive
resonators with submicron gap spacings,” proceedings, Hilton
Head 2002, solid-state sensor, actuator and Microsystems
workshop, pp. 281-284.
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